The MEMS and NEMS Technology Group (MN) program will highlight recent advances in the broad areas of micro/nanoelectromechanical systems (MEMS/NEMS), especially the latest fundamental studies of novel materials and processes, devices, and emerging functions and applications of MEMS/NEMS, in various areas. Our program will include resonant low-dimensional materials and parametric and nonlinear MEMS/NEMS resonators, which create intriguing possibilities of integrating these devices with existing fluidic, electronic, and optical on-chip networks. The program continues to embrace the latest progress in optical MEMS/NEMS, micro/nanophotonics, optomechanics, quantum MEMS/NEMS, resonant systems, CMOS-MEMS, mesoscopic dynamics, and dissipation processes, inertial sensors, harsh-environment transducers, and MEMS/NEMS-enabled energy technologies, etc. It also aims to capture some of the latest advances in soft materials, flexible and implantable MEMS/NEMS for biosensing, bio-inspired microsystems, and wearable and wireless healthcare.
MN1-WeM: MEMS Processes, Materials, and Fabrication
- Vikrant Gokhale, US Naval Research Laboratory, “Epitaxial Materials and Devices for High-Performance RF Acoustics”
- Robert Roberts, The University of Texas at El Paso, “Additive Manufacturing for 3D Metal Microsystems”
MN2-WeM: Nanomechanics
- Benjamín Alemán, University of Oregon, “Spatial Mapping and Analysis of Graphene Nanomechanical Resonator Networks”
MN-ThP: MEMS/NEMS Poster Session