The Spectroscopic Ellipsometry (EL) Topic integrates themes ranging from classical materials science and thin film characterization to nanometer-scale science and novel optical sensing concepts. We will host four oral sessions dedicated to traditional applications of spectroscopic ellipsometry in optical materials and thin film characterization as well as new and emerging topics. The first oral session will focus on the many industrial applications of ellipsometry. The second oral session is dedicated to topics in analytical methods such as the use of artificial intelligence and other state-of-the-art methods to big data in ellipsometric analysis. The third oral session will host presentations on classical research topics of ellipsometry such as optical coatings and inorganic thin-film characterization. Furthermore, presentations on the ellipsometric investigation of novel optical and electronic materials and materials with subwavelength structures will be included. The fourth oral session will focus on emerging technological advances and breakthroughs of spectroscopic ellipsometric instrumentation. The best student paper, which is selected based on the quality of the research, its presentation, and discussion during the symposium, will be awarded with the EL student award. EL will host a poster session.
EL1: Industrial Applications of Spectroscopic Ellipsometry
- Shankar Krishnan, KLA-Tencor, “Spectroscopic Ellipsometry and Reflectometry for Advanced Semiconductor Metrology “
- Andre Miller, Intel, “Ellipsometry in Industrial Applications”
EL2: Big Data, AI, and Analytical Methods
- Long Le, Vietnam Academy of Science and Technology, Viet Nam, “Decoding ‘Maximum Entropy’ Deconvolution”
- Nikolas Podraza, University of Toledo, “Ellipsometry analysis overview”
EL3+TF: Thin Films & Novel Materials
- Vanya Darakchieva, Lund University, Sweden, ” Enhancement of Electron Effective Mass in Semiconductor Materials and 2DEGs Revealed by THz Optical Hall Effect “
- Rafal Korlacki, University of Nebraska – Lincoln, ” Combined Density Functional Theory and Spectroscopic Ellipsometry Studies of Anisotropic Materials “
EL4: Instrumentation
- M. J. Lee, Samsung, Republic of Korea, “An Overview of Novel Ellipsometry Methods”
- Troy Ribaudo, Onto Innovation, ” Ellipsometry Instrumentation in the Mid-Infrared for Semiconductor Metrology”
EL5: Spectroscopic Ellipsometry Poster Session